Electronic cigarettes and MEMS
Electronic cigarettes do not contain harmful ingredients such as tar and suspended particles. As people's health awareness increases, smoking electronic cigarettes is becoming a trend. In addition, the e-cigarette oil can be flavored with flavoring agents of different ingredients, and users can choose the flavor of the oil according to their preferences.
MEMS (Micro-Electro-Mechanical Systems) refers to micro-electromechanical systems that involve precision micromachining at the micron scale to create various types of micro-sensors and micro-actuators. Among these, pressure sensors are among the earliest and most widely applied MEMS sensors. They are primarily classified based on their detection principles into piezoresistive and capacitive types, both of which utilize silicon materials and are fabricated into micron-scale pressure-sensitive membranes through photolithography and etching techniques.
电子烟咪头
目前市场上电子烟产品，主要使用咪头作为压力开关。咪头成本低廉，但也存在一些使用中的痛点需要解决。
一致性：
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多零件组装，存在装配公差，不能保证触发压力的一致性
防油性：
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烟油或水汽进入电容膜片间隙，造成性能降低，严重情况甚至失效
SMT兼容性：
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需要手工焊接，而且对焊接工要求挺高，这是影响产能的一个原因
基于单颗器件的解决方案
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单颗差压传感器实现吸力检测
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器件膜片一侧接触气流通道，另一侧接触大气压力，防水防油
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多种输出接口：中断，频率，I2C
相对传统咪头的优势
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低成本：单芯片差压检测，整机设计更加紧凑
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防油性：采用背面进气方式，防水防油
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一致性：MEMS微米级加工工艺，器件差异性小，并且出厂前校准测试，保证触发压力一致
敏芯股份认为，MEMS压力传感器是电子烟中可实现抽吸开关的最优解决方案之一。为此通过反复改良优化，拥有卓越可靠性与稳定性的敏芯MEMS压力传感器，已获得众多客户的认可与信赖并持续供货放量。此外，利用MEMS平台型企业的技术叠加优势，敏芯股份率先开发了包括流量计和流量开关在内的芯片，实现对电子烟高中低品牌市场的覆盖
来源：敏芯股份
原文始发于微信公众号（雾化科技展）：Application of MEMS sensors in electronic cigarettes
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